Blazed grating fabrication through gray-scale Xray lithography
نویسندگان
چکیده
منابع مشابه
Blazed grating fabrication through gray-scale Xray lithography.
Blazed gratings have been fabricated using gray-scale X-ray lithography. The gratings have high efficiency, low parasitic light, and high groove quality. The fabrication technique and resist characterization are described. The gratings can be generated over a considerable range of distances from the X-ray mask, thus demonstrating the ability to write gratings on a substrate of effectively arbit...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2003
ISSN: 1094-4087
DOI: 10.1364/oe.11.000270